The change of two dimensional micro distance is measured by using a position sensor and the two dimensional amplification of double optical lever.
利用光电位置传感器和二维双光杠杆放大,能够测量出二维微小距离的变化。
The change of two dimensional micro distance is measured by using a position sensor and the two dimensional amplification of double optical lever.
利用光电位置传感器和二维双光杠杆放大,能够测量出二维微小距离的变化。
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