A novel structure with a double step buried oxide SOI (D-SBOSOI) is developed on the basis of single step buried oxide structure.
在单面阶梯埋氧型soi结构的基础上，提出了一种双面阶梯埋氧soi新结构。
A novel structure with a double step buried oxide SOI (D-SBOSOI) is developed on the basis of single step buried oxide structure.
在单面阶梯埋氧型soi结构的基础上，提出了一种双面阶梯埋氧soi新结构。
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