Effects of source box, vacuum shell, dead layer and P-type wick in the calculation are considered in detail.
计算中仔细考虑了源盒、真空壳、死层及P型芯等的影响。
With decreasing the film thickness, both the dislocation spacing and the ratio of the dead layer to film total thickness increase.
随着薄膜厚度的减小，位错间距增大，“死层”厚度与薄膜总厚度之比增加。
With decreasing the film thickness, both the dislocation spacing and the ratio of the dead layer to film total thickness increase.
随着薄膜厚度的减小，位错间距增大，“死层”厚度与薄膜总厚度之比增加。
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