This letter demonstrates that the insulating ZnO films can be deposited by DC sputtering from oxygen-deficient ZnO targets to lower the cost of thin film solar cells.
本工作表明使用贫氧靶材直流溅射制备的高阻透明氧化锌薄膜可以应用于薄膜太阳能电池并有效地降低其成本。
This letter demonstrates that the insulating ZnO films can be deposited by DC sputtering from oxygen-deficient ZnO targets to lower the cost of thin film solar cells.
本工作表明使用贫氧靶材直流溅射制备的高阻透明氧化锌薄膜可以应用于薄膜太阳能电池并有效地降低其成本。
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