A low power cylindrical anode layer ion source and its working characteristic, and the beam distribution are introduced.
介绍了一种低功率圆柱形阳极层离子源的工作特性和束流分布特性。
A low power cylindrical anode layer ion source and its working characteristic, and the beam distribution are introduced.
介绍了一种低功率圆柱形阳极层离子源的工作特性和束流分布特性。
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