A novel electrostatic microrelay with parallel-comb drive structure and its fabrication process were presented.
介绍了一种新型的、利用并联梳齿结构驱动的静电型微继电器及其制造工艺。
We have studied the basic structure of the lateral comb drive micromechanical silicon gyroscopes and discussed its working laws in details.
研究了硅微型梳状线振动驱动式陀螺仪的基本结构，详细讨论了它的工作原理。
By the sketch of structure of lateral comb drive micromechanical silicon gyroscopes, the authors have fully explained the working laws of this kind of gyroscope.
通过硅微型梳状线振动驱动式陀螺仪的结构示意图，介绍了该陀螺仪的工作特点。
And, by Newton's mechanics laws, we have also acquired the accurate differential equation that presents the working of the lateral comb drive micromechanical silicon gyroscopes.
并利用牛顿力学定律推导了硅微型梳状线振动驱动式陀螺仪工作时所满足的精确的微分方程模型。
However, due to fabrication error, asymmetric drive structure, small disturbance and so on, the movable comb fingers move laterally and rotationally from the fixed ones.
但由于加工误差、驱动结构不对称、扰动等因素，使得活动梳齿相对固定梳齿发生偏转。
The driving mode, the advantage and disadvantage upon micro-actuator, the traits, applications and the principle of electrostatic comb-drive are introduced.
介绍了微执行器的驱动方式及各自的优缺点、静电梳齿结构的特点和应用以及静电梳齿结构的工作原理。
The driving mode, the advantage and disadvantage upon micro-actuator, the traits, applications and the principle of electrostatic comb-drive are introduced.
介绍了微执行器的驱动方式及各自的优缺点、静电梳齿结构的特点和应用以及静电梳齿结构的工作原理。
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