Pd, Pt and their alloy films on polyimide were prepared by Catalyst-Enhanced Chemical Vapor Deposition (CECVD) under the carrier gas (N2, O2).
以N2，O2作载气，通过催化增强化学蒸气沉积（CECVD）分别制得在聚酰亚胺上的金属铂、钯及其合金薄层。
Pd, Pt and their alloy films on polyimide were prepared by Catalyst-Enhanced Chemical Vapor Deposition (CECVD) under the carrier gas (N2, O2).
以N2，O2作载气，通过催化增强化学蒸气沉积（CECVD）分别制得在聚酰亚胺上的金属铂、钯及其合金薄层。
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