The device comprises a semiconductor laser light source, an optical beam shaping system, an optical beam transmission system, an optical beam scanning system, an optical focusing system, and the like.
该装置包括半导体激光光源、光束整形系统、光束传输系统、光束扫描系统、光学聚焦系统等。
Cleaning efficiency of the high-pressure beam formation automat - IC cleaning system is 6 ~ 7 times increase than the square scanning.
这种高压束阵式自动清洗系统比方阵扫描式提高清洗效率6 ~7倍。
A submillimeter wave (SMMW) beam field distribution automatic measurement system using a scanning mirror with microcomputer control has been built and studied.
研究一种采用反射镜扫描方法由微机控制的亚毫米波场分布自动测量系统。
An imaging system of pattern generator was designed to correct linear distortion of scanning field of ane-beam lithography system, which was composed of both hardware and software.
为实现电子束曝光机扫描场的线性畸变校正，设计了图形发生器的成像系统，该系统包括硬件和软件两部分。
The deflection system of an electron beam lithography tool is used to control deflection scanning of electron beam.
电子束曝光机的偏转系统控制电子束偏转扫描。
The theoretical results show that a smaller correlation length of screen surface and the narrowing of laser beam in scanning direction can reduce speckle contrast for this system.
通过分析结合模拟结果，认为减小屏表面的相关长度，在扫描方向压窄激光光斑可以减小该系统中的散斑对比度。
The influences of target motion on dose homogeneity and conformity degree were theoretically studied under the condition of the active raster-scanning beam delivery system.
从理论上研究了在主动型栅扫描束流配送系统下，靶体运动对靶区剂量均匀性以及重离子治疗适形程度的影响。
The theory of speckle formation in laser scanning display system is established based on the averaging effect of eye response as laser beam scanning through an eye resolution spot.
基于人眼对系统扫描人眼分辨斑过程的平均效应，建立了激光扫描显示系统中散斑的形成理论。
Focusing on the problem such as slow scanning speed, complex system design and low light efficiency, a simple method to obtaining optical sectioning in multiple-beam confocal measurement was proposed.
针对共焦测量中单点扫描速度慢、机构复杂、光能利用率低的问题，介绍了一种利用结构光和共焦显微术相结合来实现多光束测量的新方法。
The Auto Body coordinate Laser Scanning Sensor Basing On Collaboration Target is a 2D or 3D coordinate measuring system using a kind of measuring principle which named four-beam laser scanning.
基于合作靶标的激光扫描车身坐标测量传感器，是运用四光束激光扫描测量原理，综合运用激光、光电、精密测量等技术进行非接触二维或者三维坐标测量的检测系统。
The Auto Body coordinate Laser Scanning Sensor Basing On Collaboration Target is a 2D or 3D coordinate measuring system using a kind of measuring principle which named four-beam laser scanning.
基于合作靶标的激光扫描车身坐标测量传感器，是运用四光束激光扫描测量原理，综合运用激光、光电、精密测量等技术进行非接触二维或者三维坐标测量的检测系统。
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