It reveals the essence of the backstreaming of diffusion pump and provides a theoretical basis for reducing the backstreaming of diffusion pump.
揭示了扩散泵返流的实质，为减少扩散泵返流提供了理论依据。
It reveals the essence of the backstreaming of diffusion pump and provides a theoretical basis for reducing the backstreaming of diffusion pump.
揭示了扩散泵返流的实质，为减少扩散泵返流提供了理论依据。
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