The simulating result shows that the energy deposition distribution is average comparatively, and the exposure resolution is enhanced largely by using the corrected shot dose.
结果表明：采用修正后的剂量曝光，光刻胶中的能量沉积比较均匀，曝光分辨率有较大幅度的提高。
The simulating result shows that the energy deposition distribution is average comparatively, and the exposure resolution is enhanced largely by using the corrected shot dose.
结果表明：采用修正后的剂量曝光，光刻胶中的能量沉积比较均匀，曝光分辨率有较大幅度的提高。
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