On the basis of the aiming principle of the atomic force probe a-long with 2D micro-displacement system and the high precision capacitive sensors , the micro-dimension measurement system is developed.
本文基于原子力微探针瞄准原理并结合二维微位移系统和高精度电容传感器，研制了微尺寸测量系统。
On the basis of the aiming principle of the atomic force probe a-long with 2D micro-displacement system and the high precision capacitive sensors , the micro-dimension measurement system is developed.
本文基于原子力微探针瞄准原理并结合二维微位移系统和高精度电容传感器，研制了微尺寸测量系统。
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