A microwave three probe system has been used to study the changes of annular waveguide plasma source impedance with operational parameters.
采用微波三探针研究了环形波导等离子体源阻抗特性随运行参数的变化。
A microwave three probe system has been used to study the changes of annular waveguide plasma source impedance with operational parameters.
采用微波三探针研究了环形波导等离子体源阻抗特性随运行参数的变化。
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