A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection Angle measurement.
为了实现较大的偏转角度测量，该平行平板干涉仪引入了一位置探测系统。
A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection Angle measurement.
为了实现较大的偏转角度测量，该平行平板干涉仪引入了一位置探测系统。
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