An analyzer magnet and ion implanter including the magnet pole are also provided so that a method of improving low energy ion beam space charge neutralization in an ion implanter is realized.
本发明亦提供一分析器磁铁以及包括前述磁极的离子布植机,因此实现了一改良一离子布植机中的低能量离子束空间电荷中和的方法。
By testing, homogeneity of magnetic field, magnet stability in temperature, integral stability is good. Magnet can create a proper a uniformity region for NMR core analyzer.
通过磁体的测试,可知磁体的均匀度、磁场场强的温度稳定性、磁体的总体稳定性良好,完全可以给核磁共振全直径岩心分析仪营造一个合适的匀场环境。
By testing, homogeneity of magnetic field, magnet stability in temperature, integral stability is good. Magnet can create a proper a uniformity region for NMR core analyzer.
通过磁体的测试,可知磁体的均匀度、磁场场强的温度稳定性、磁体的总体稳定性良好,完全可以给核磁共振全直径岩心分析仪营造一个合适的匀场环境。
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