A dual absorbing tower shower containing oxidant and alkaline absorbant was used for removing arsine, phosphorus, sulfur, fluorine, chlorine and oxynitrides.
用椭圆型喷淋吸收塔，氧化剂、碱吸收治理半导体工业废气中砷、磷、硫、氟、氯、氮氧化物及各种酸。
A dual absorbing tower shower containing oxidant and alkaline absorbant was used for removing arsine, phosphorus, sulfur, fluorine, chlorine and oxynitrides.
用椭圆型喷淋吸收塔，氧化剂、碱吸收治理半导体工业废气中砷、磷、硫、氟、氯、氮氧化物及各种酸。
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