一种公共分配中心，向自动化晶片处理系统中的各个部分提供所有的电源、气体、化学原料和其它服务。
A common distribution core that provides all electrical power, gases, chemicals, and other services to the sectors of an automated wafer processing system.
结果系统的质量不仅与废水处理系统本身的结构参数、操作参数有关，而且与电源系统和热控系统的工作特性关系密切。
Result The system mass depended not only on the structural parameters and operational parameters of TIMES, but also on the operational characteristics of power subsystem and thermal control subsystem.
结果系统的质量不仅与废水处理系统本身的结构参数、操作参数有关，而且与电源系统和热控系统的工作特性关系密切。
Result The system mass depended not only on the structural parameters and operational parameters of TIMES, but also on the operational characteristics of power subsystem and thermal control subsystem.
应用推荐