介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
微机械技术是研究，生产微机械器件和微电子机械系统的关键技术，熟练掌握并不容易。
Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage.
最近几年来，微电子机械系统（MEMS）逐渐向光学方面渗透，在二十世纪九十年代中后期形成了全新的技术领域—微光机电系统（MOEMS）。
In recent years, with micro-electro mechanical systems (MEMS) penetrating gradually through optics, a full new technique field-micro-opto-electro- mechanical systems (MOEMS) came into being in 1990's.
器件采用微电子机械加工技术和键合技术研制。
The two parts are fabricated by MEMS technology and combined as aw.
采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜，可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。
Fabricating the nanoporous silicon membrane with nanotechnology and Bio-MEMS technology, the thickness of membrane, pore size and distribution, geometry shape and porosity can precisely controlled.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
研究发现，通过合理的选择工艺参数，可以制备具有特定孔隙率的多孔硅薄膜，可广泛的应用于微电子机械系统(MEMS)技术中。
It was found that a certain porosity of PS film to be widely used in MEMS technology can be obtained by selecting optimal process parameters.
微电子机械系统(MEMS)技术加工的微机械陀螺仪具有体积小、重量轻、成本低、容易批量化生产等优点，当前在许多领域具有非常广阔的应用。
Micromachined vibratory gyroscopes processed by MEMS technology have the merit of small size, light weight, low cost, and have a variety of applications in many fields nowadays.
微电子机械系统(MEMS)技术加工的微机械陀螺仪具有体积小、重量轻、成本低、容易批量化生产等优点，当前在许多领域具有非常广阔的应用。
Micromachined vibratory gyroscopes processed by MEMS technology have the merit of small size, light weight, low cost, and have a variety of applications in many fields nowadays.
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