微机械技术是研究，生产微机械器件和微电子机械系统的关键技术，熟练掌握并不容易。
Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage.
这些微器件与信号调节和处理电路集成后，组成了可执行分布式实时控制的微电子机械系统(MEMS)。
These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electro-mechanical systems (MEMS) that can perform real-time distributed control.
介绍了微电子镀覆在半导体和IC封装、凸点制作、多芯片组件以及微电子机械系统中的应用。
This article describes the application of microelectronic plating in manufacture of semiconductor, IC packaging, micro-bumps, multichip modules and microelectronics mechanical systems.
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
本发明涉及一种增加变形梁强度和使用寿命的结构及其应用，属于微电子机械系统(MEMS)领域。
The invention relates to a structure for increasing strength and service life of a deformable beam and an application thereof, belonging to the field of micro-electronic mechanical system (MEMS).
本文分两部分概要地介绍了美国生物医学界应用MEMS（微电子机械系统）微传感器和MEMS 微系统的研究动向。
This article briefly introduces UK- research trends of MFMS ( microelectronics and machinery system) micro transducers and MEMS microsystems in American biomedical circle.
采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜，可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。
Fabricating the nanoporous silicon membrane with nanotechnology and Bio-MEMS technology, the thickness of membrane, pore size and distribution, geometry shape and porosity can precisely controlled.
文章评述了影响微电子机械系统（MEMS）成品率和可靠性的粘合力和摩擦力问题。
The stiction and friction influencing the yield and reliability of MEMS are reviewed in this paper.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
应用推荐