The stage is also the base of designing ultra precision machine tools.
该精密运动平台也是研制超精密加工机床的基础。
Filtration membrane media used for precision filtration and ultra precision filter.
过滤膜介质用于精滤及超精滤。
The ultra precision machining aims at obtaining the designed surface functions through the surface quality controlling.
超精密加工的目标是通过表面质量控制获得预定的表面功能。
Motion control system of an ultra precision wafer stage with application to integrated circuit production was presented.
描述一种应用于集成电路制造的超精密硅片台系统及其运动控制。
The two basic precision requirements for ultra precision diamond cutting tool are the precision of outline and edge radius.
超精密金刚石刀具的两个基本精度要求是刀刃轮廓精度和刃口半径。
Manufactures CNC Jig Grinders, ultra precision diamond turning and grinding machines, hydrostatic spindles and rotary tables.
生产数控坐标磨床、精金刚石车磨床、压主轴头及转台。
For several decades, ultra precision manufacturing technology has qualitative changes not only in aspect of accuracy but also of method.
几十年来，超精密加工技术在精度和手段上都有了质的飞跃。
They will build the most advanced technology system of ultra precision machining by pre-research and technology transformation in their country.
并还将通过预研和技改，建成国内最先进的超精加工技术系统。
Ruifeng specializes in ultra precision, SMD, ultra small, ultra-thin, multifunctional, waterproof type switch, socket R & D and manufacturing.
瑞丰专业致力于超精密、贴片式、超小、超薄、多功能、防水式开关、插座的研发与制造。
The problems of batch manufacturing optical components in laser nuclear fusion are solved by applying the technology of the ultra precision machining.
应用超精密加工技术解决了激光核聚变光学元件的大批量加工问题。
On ultra precision cutting, grinding and non-traditional machining, there is a hard problem between long travel and high precision, especially in multi-coordinate machining.
在超精密切削、磨削、特种加工中，大行程驱动与高精度进给是难以解决的矛盾，也是多坐标超精密加工的难点。
Geometric errors are the most significant sources which affect the accuracy of ultra precision manufacturing tremendously. The spindle deviation is one of the main kind of them.
几何误差对超精密车床加工精度具有较大的影响，主轴偏角误差就是其中较为主要的一种。
Ultra precision manufacturing is as an important branch of modern manufacturing technology, as being the essential basic for compact design and increasing functions of large system.
超精密加工是现代制造技术的一个重要组成部分，是众多大型系统实现简化设计和扩展功能的必要基础。
On the basis of analysis on error model of ultra precision CNC machine tool, the variant gain cross coupling control algorithm is introduced into the servo control of ultra precision CNC machine tool.
文章在分析超精密数控机床误差模型的基础上，将变增益交叉耦合控制算法引入超精密数控机床的伺服控制。
Detailed analyses of the grain size distribution characteristics and the grain profile wavelength of fine diamond grinding wheel used for ultra-precision grinding are presented.
对超精密磨削所用细粒度金刚石砂轮磨粒粒径的分布特点和砂轮表面上磨粒的轮廓波长进行了分析。
Abrasive machining plays an important role in precision and ultra-precision processing technology.
磨粒加工是现代精密与超精密加工中重要的加工方法。
We worked out YH-1 ultra-precision machining tool CNC software, which is characterized with high resolution, short interpolation period and optics universal equation interpolation.
编制了YH - 1超精密数控机床数控系统软件，该软件具有分辨率高、插补周期短的特点，并且具有光学普适方程的插补功能。
This paper describes accurate surface profile measurement of an aspherical lens on an ultra-precision grinding machine using the error separation technique.
描述了一种在超精密磨削机床上基于误差分离法的非球面表面形状精密测量系统。
To machining of aspheric part of high precision and high quality, interpolation algorithm of ultra-precision aspheric numerical control system is very important.
为了加工出高质量的非球曲面器件，超精密非球曲面数控系统的数控插补算法非常重要。
In view of this, this thesis proposes the use of abrasive flowing machining technology for ultra-precision polishing of nozzle.
鉴于此，本文提出了采用磨粒流加工技术对喷油嘴进行超精密抛光。
The conditioning ring polishing machining is used for ultra-precision planarization; and kinematical analysis on pitch polishing is carried out.
修正环型抛光机用于超精密平面抛光，并对沥青抛光进行了运动学分析。
A review of the recent oversea research on the mechanism of ultra-precision cutting and the research methods are given.
介绍国外应用分子动力学研究超精密切削机理的现状和方法。
A good vibration damping measure is very important for the enhanced working accuracy of machine tools, especially for that of ultra-precision machines.
良好的减振措施是提高机床，特别是超精密机床加工精度的重要技术之一。
In this paper, the typical 6 kinds of optical glasses have been grinding by the ultra-precision grinding, brittle-ductile transition's critical depth of brittle materials is researched theoretically.
利用超精密磨床磨削加工6种典型的光学玻璃，先从理论上研究了脆性材料脆塑转变的临界值。
With the increasing demands for higher accuracy and higher productivity of the ultra-precision equipments, ultra-precision gas bearing stage systems driven by linear motor become research hotspots.
随超精密装备加工精度和生产率的不断提高，直线气浮系统得到广泛重视和研究。
The surface quality of the ultra-precision machined substrates greatly affects the performance of the thin films grown on it.
基片是薄膜材料生长的载体，其超精密加工表面质量直接影响薄膜性能。
The cutting experiment is proceeded with a self-made fast servo tool and a computer control system on ultra-precision lathe.
利用所研制的快速伺服刀架、计算机控制系统，在超精密车床上进行了切削试验。
In diamond ultra-precision turning, there is unavoidably, a relative vibration between the tool and the workpiece, which influences the quality of workpiece surface.
在金刚石超精密车削加工中，刀具与工件之间不可避免地存在一定的振动，从而影响工件表面质量。
It is a sign of the machining level of ultra-precision cutting reflected by the achieving of minimum cutting thickness. And it will be significant to the analysis of extra thin cutting.
最小切削厚度的获得是反映超精密切削加工水平的重要标志，因此对极薄切削进行分析具有重要意义。
Accurately position measuring of online measuring system is the key in developing of ultra-precision machine tool.
作为重点技术攻关项目，超精密机床的研制关键在于在线检测系统能否准确地定位测量。
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