The results show that the critical load of TiAlN film is up to 56 N, increased by 43% compared with the highest critical load before optimization.
优化后的涂层与基体的临界载荷达到56N，比优化前最大临界载荷增加43%。
The fracture toughness KIC of TiAlN coating has been measured by Weishi indenter indentor and the appearance of impress has also been observed by SEM.
并采用维氏压头测量断裂韧性KIC和通过扫描电子显微镜观察压痕形貌来评定涂层的韧性。
The results show that the target current has a great influence on the performance of TiAlN/TiN film. The surface of film becomes out-of-flatness by increasing target current.
结果表明：靶材电流对膜层组织和硬度有显著影响，电流越高膜层表面越不平整，显微硬度随靶材电流的升高先上升后降低。
Thermal residual stresses in TiAlN coatings were calculated using the finite element method. Effects of different substrates and interlayer bonding on residual stress field were investigated.
采用有限元方法分析氮铝钛涂层的残余热应力，研究不同的基体及过渡层对残余热应力分布的影响。
Thermal residual stresses in TiAlN coatings were calculated using the finite element method. Effects of different substrates and interlayer bonding on residual stress field were investigated.
采用有限元方法分析氮铝钛涂层的残余热应力，研究不同的基体及过渡层对残余热应力分布的影响。
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