In comparison with the current discretization finite element method, the present method has the merits of easy data input, quick operation and storage saving in computer analysis.
本文方法与现有的离散化有限元法相比，具有输入数据简单，运算速度快，大量节省计算机内存的优点。
The invention provides a computer readable storage medium storing a program for performing an operation method of a substrate processing apparatus.
本发明提供一种存储有进行基板处理装置的运行方法的程序用的计算机可读取的存储介质。
The invention provides a computer readable storage medium storing a program for performing an operation method of a substrate processing apparatus.
本发明提供一种存储有进行基板处理装置的运行方法的程序用的计算机可读取的存储介质。
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