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  • The process of SU-8 photoresist lithography is researched, and the influence of steps like coating and soft-bake on the lithography is studied.

    初步研究了SU-8胶的光刻工艺流程，讨论了涂胶、前烘等各个步骤对光刻结果的影响。

    youdao

  • The process of SU-8 photoresist lithography is researched, and the influence of steps like coating and soft-bake on the lithography is studied.

    初步研究了SU-8胶的光刻工艺流程，讨论了涂胶、前烘等各个步骤对光刻结果的影响。

    youdao

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