Compared with the traditional silicon slice detergent, the unit cost is reduced by about 60%.
本发明与传统的硅片清洗剂相比单位成本下降近60%。
In this paper, WO3 thin film was deposited on glass substrate and silicon slice by DC reactive magnetron sputtering and using metal tungsten as target.
本文采用直流反应磁控溅射工艺，以金属钨为靶材，在玻璃和单晶硅片上沉积了WO 3薄膜。
S2, coating one or a plurality of metallic layers on the back of the silicon slice subjected to the surface treatment by vaporization on the vacuum condition;
S2在真空条件下，在表面处理后的硅片背面蒸镀一层或多 层金属层；
S2, coating one or a plurality of metallic layers on the back of the silicon slice subjected to the surface treatment by vaporization on the vacuum condition;
S2在真空条件下，在表面处理后的硅片背面蒸镀一层或多 层金属层；
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