The boundary structural parameters of a silicon resonant pressure microsensor are optimized in this paper.

对一种硅谐振式压力微传感器敏感结构的边界结构参数进行了优化设计。

youdao

The boundary structural parameters of a silicon resonant pressure microsensor are optimized in this paper.

对一种硅谐振式压力微传感器敏感结构的边界结构参数进行了优化设计。

youdao