Particularly, the present invention provides a modular processing cell to be used in a cluster tool.

具体地，本发明提供一种模块化处理单元。

youdao

This paper discusses the key technologies of digital IF processing, the principle and the function of each processing cell are presented and the realization of them is also given in the paper.

讨论了中频数字化处理的关键技术，介绍了各个处理单元的原理及功能并给出了它们的实现方法。

youdao

This paper discusses the key technologies of digital IF processing, the principle and the function of each processing cell are presented and the realization of them is also given in the paper.

讨论了中频数字化处理的关键技术，介绍了各个处理单元的原理及功能并给出了它们的实现方法。

youdao