Single step mask fabrication process is developed for LIGA technology, which made mask-making process simplified.

在LIGA技术研究中提出了一次掩膜成型法，简化了工艺过程；

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Single step mask fabrication process is developed for LIGA technology, which made mask-making process simplified.

在LIGA技术研究中提出了一次掩膜成型法，简化了工艺过程；

youdao