A method for analyzing and optimizing fabrication techniques using variations of materials, unit processes, and process sequences is provided.
提供一种利用材料、单元工艺、和工艺顺序的改变分析和优化半导体制造技术的方法。
Methods and tools such as block diagrams, matrix and flowcharts can be used to support the development of process sequences and their interactions.
各种方法和工具，诸如方块图、矩阵图、流程图都能用来支持过程顺序以及过程和过程相互作用的开发。
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
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