薄膜表面光滑、无裂纹、致密性好；
The surface of the films is smooth, homogeneous, crack free and dense.
氮化钛膜层表面呈胞状结构生长，膜层结构致密，未见显微孔洞和裂纹的存在。
The TiN surface film grow as cell-shaped structure and the film microstructure is compact.
氮化钛膜层表面呈胞状结构生长，膜层结构致密，未见显微孔洞和裂纹的存在。
The TiN surface film grow as cell-shaped structure and the film microstructure is compact.
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