文中给出了电流效率和比能耗。
Current efficiency and specific energy consumption were given.
阴离子对电流效率的作用可以忽略。
脉冲参数对电流效率无影响。
该工艺操作简单，工艺范围宽，电流效率高，沉积速度快。
The process features simple operation, wide operating range, high current efficiency and fast deposition speed.
放大实验表明，有利于电流效率的提高，为将来工业化生产提供了依据。
Pilot experiments show that the current efficiency is very critical to the future scale-up production.
放大实验表明，有利于电流效率的提高，为将来工业化生产提供了依据。
Pilot experiments show that the current efficiency is very critical to the future scale-up production.
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