各参数对沉积速率影响的主次顺序为：沉积温度、沉积时间、氢气流量、氮气流量。

Primary and secondary sequence of parameters is temperature, time, flow rate of hydrogen and nitrogen.

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各参数对沉积速率影响的主次顺序为：沉积温度、沉积时间、氢气流量、氮气流量。

Primary and secondary sequence of parameters is temperature, time, flow rate of hydrogen and nitrogen.

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