这就是惟一那点小缺陷，否则将是圆满的成功。
在检测小缺陷时尤其关心灵敏度问题。
The sensitivity of detection is more concerned when small defects are important.
说明：完整的屏保工程，有点小缺陷，但是原理很突出！
A complete screen saver project, a bit small defects, but the principle is very prominent!
划伤-晶圆片表面上的小皱造成的缺陷。
Slip - A defect pattern of small ridges found on the surface of the wafer.
划伤-晶圆片表面上的小皱造成的缺陷。
Slip - A defect pattern of small ridges found on the surface of the wafer.
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