给出了一种MEMS压控电容的设计和相位噪声分析结果。
Design and phase noise analysis of a MEMS varactor is presented.
操作采用手控或气控压、控时。控温半自动控制三种。
Manual control or electric control of pressure, time, temperature or semiautomatic control.
操作采用手控或气控压、控时。控温半自动控制三种。
Manual control or electric control of pressure, time, temperature or semiautomatic control.
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