This effect is very significant at low substrate temperature or high deposition rate.
而且能量的影响在较低的基片温度或是较高的沉积速率时更加显著。
The effect of substrate materials and its temperature on film micro structure is studied.
研究了衬底材料、基片温度对膜微结构的影响。
The temperature difference between the thermal conductor and the glass substrate was also studied.
此外对石墨导热体和置于其上的玻璃基片两者之间的温度差别做了初步研究。
The temperature difference between the thermal conductor and the glass substrate was also studied.
此外对石墨导热体和置于其上的玻璃基片两者之间的温度差别做了初步研究。
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