A group management system, a semiconductor manufacturing device and an information processing method are provided.
提供一种群管理系统、半导体制造装置以及信息处理方法。
Therefore, production planning and capacity planning of semiconductor manufacturing system is a very complicated problem.
以上因素，决定了半导体制造系统生产计划与能力计划问题是一个非常复杂的问题。
Provided are a semiconductor device and a method of manufacturing the same.
本发明提供一种半导体器件及其制造方法。
Provided are a semiconductor device and a method of manufacturing the same.
本发明提供一种半导体器件及其制造方法。
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