In its substrate material: can deposited metal or form membrane of the material.
基体材料：能在其上沉积金属或形成膜层的材料。
This effect is very significant at low substrate temperature or high deposition rate.
而且能量的影响在较低的基片温度或是较高的沉积速率时更加显著。
This effect is very significant at low substrate temperature or high deposition rate.
而且能量的影响在较低的基片温度或是较高的沉积速率时更加显著。
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