It is demonstrated that the cantilever make the system have nanometer level resolution.
实验表明，这种微悬臂使系统可以达到纳米量级的分辨率。
Motion resolution in nanometer scale is the important characteristic indicator of ultra-precision machine tool.
纳米级分辨率的运动是当今超精密机床精度指标的特征标志。
Motion resolution in nanometer scale is the important characteristic indicator of ultra-precision machine tool.
纳米级分辨率的运动是当今超精密机床精度指标的特征标志。
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