The method of the present invention can greatly increase evenness of the grid oxide layer.
采用本发明的方法可大幅提高栅极氧化层的均匀性。
The grid intersection is from the x and y routing grid pitch for that layer.
在网格交叉点上是通过图层工艺网格的X和Y轴。
The grid intersection is from the x and y routing grid pitch for that layer.
在网格交叉点上是通过图层工艺网格的X和Y轴。
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