In this step, the adduct from step 1 is fluorinated.
在这一步，将步骤1的加合产物进行氟化。
In this paper, the recent research progress of low-K fluorinated amorphous carbon film is introduced.
着重叙述了具有低介电常数的氟化非晶碳薄膜的研究进展。
In this paper, the recent research progress of low-K fluorinated amorphous carbon film is introduced.
着重叙述了具有低介电常数的氟化非晶碳薄膜的研究进展。
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