The slow-cooling device is a group of nozzles communicated with a fuel gas source.
缓冷却装置为与燃气 源相连通的一组喷嘴。
A group management system, a semiconductor manufacturing device and an information processing method are provided.
提供一种群管理系统、半导体制造装置以及信息处理方法。
A group management system, a semiconductor manufacturing device and an information processing method are provided.
提供一种群管理系统、半导体制造装置以及信息处理方法。
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