The TiN surface film grow as cell-shaped structure and the film microstructure is compact.

氮化钛膜层表面呈胞状结构生长，膜层结构致密，未见显微孔洞和裂纹的存在。

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The results show that the surface of films is smooth and compact;

结果表明：薄膜表面平整光滑；

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The results show that the surface of films is smooth and compact;

结果表明：薄膜表面平整光滑；

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