The conception of the standard space for anisotropic damage body is given here.
给出了损伤各向异性体规范空间结构的概念。
It has advantages of sample structure, low damage and anisotropic etching.
该装置具有结构简单，低损伤和各向异性刻蚀的优点。
It has advantages of sample structure, low damage and anisotropic etching.
该装置具有结构简单，低损伤和各向异性刻蚀的优点。
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