研究表明，“沿晶”、“多边化”和“扇形解理花样”是稀土锆合金断口最常见的微观形貌特征；
The results show that the crack and the hole are the primary microdefect of fracture.
而工作气压对生长速率、薄膜形貌和微观结构的影响不明显。
The growth rate, film morphology, and microstructure are not sensitive to the deposition pressure.
而工作气压对生长速率、薄膜形貌和微观结构的影响不明显。
The growth rate, film morphology, and microstructure are not sensitive to the deposition pressure.
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