The optical focus sensor includes a splitter configured to split the radiation beam into a first sub-beam and a second sub-beam.
光学聚焦传感器包括分束器，该分束器配置为将辐射光束分为第一子光束和第二子光束。
To detect whether a substrate is in a focal plane of an inspection apparatus, an optical focus sensor is arranged to receive a radiation beam via an objective lens.
为了探测衬底是否处在检查设备的焦平面上，一种光学聚焦传感器被布置为通过物镜接收辐射光束。
To detect whether a substrate is in a focal plane of an inspection apparatus, an optical focus sensor is arranged to receive a radiation beam via an objective lens.
为了探测衬底是否处在检查设备的焦平面上，一种光学聚焦传感器被布置为通过物镜接收辐射光束。
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