Collimate and coupling technique is the key technology of MOEMS optical array.
准直、耦合技术是MOEMS光开关阵列的一项关键技术。
The fabrication technologies for micro-optical array devices used for parallel confocal microscope are given in the paper.
给出了用于并行共焦显微镜中的微光学阵列器件的制作工艺。
The fabrication technologies for micro-optical array devices used for parallel confocal microscope are given in the paper.
给出了用于并行共焦显微镜中的微光学阵列器件的制作工艺。
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