Due to space limit, the motion equations are often coupled when the micro positioning stage has multiple links and freedoms. Thus, synthesis and decouple are necessary.
当微定位台的结构是多环、多自由度时,由于空间的限制,通常其运动方程是耦合的,需对它进行综合分析和解耦。
Multiple Links can be selected for deletion.
可以选择多个链接来删除。
Multiple Links can be selected for deletion.
可以选择多个链接来删除。
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