A micromachined accelerometer with piezoelectric thin film based on the piezoelectric effect is studied.
基于压电薄膜的压电效应，研究压电薄膜微机电加速度传感器。
A new structure silicon piezoresistive micromachined accelerometer has been designed, fabricated and tested.
设计、制造并测试了一种新结构硅微机械压阻加速度计。
For its high sensitivity, good linearity and stability, capacitive micromachined accelerometer is of great concern among many kinds of accelerometers.
电容检测式微机械加速度计因为其具有较高的灵敏度、线性度和稳定性，所以在各种检测形式的加速度计中备受关注。
This paper gives the operation principle, the structure and the circuit system designs of the micromachined electrostatic servo accelerometer, and briefly describes its packaged sample.
本文详细介绍了微机械静电伺服加速度计的系统工作原理、结构和线路设计特点，并对其封装样品作了简要的叙述。
A novel micromachined capacitive accelerometer, based on slide-film damping principle, was reported.
介绍了一种新型基于滑膜阻尼的电容式微机械加速度计。
The structure, principle and the maximum sensitivity optimum design method of pendulous micromachined silicon accelerometer (PMSA) are introduced in this paper.
文中介绍了扭摆式硅微加速度计的结构原理和对其进行最大灵敏度优化设计的方法。
In Chapter 2, the operation scheme of a micromachined piezoresistive accelerometer with axially deformed tiny beams is studied in details.
第二章详细论述了一种新型的微梁直拉直压硅微机械压阻式加速度传感器的工作原理。
In Chapter 2, the operation scheme of a micromachined piezoresistive accelerometer with axially deformed tiny beams is studied in details.
第二章详细论述了一种新型的微梁直拉直压硅微机械压阻式加速度传感器的工作原理。
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