Computer aided design (CAD) of Microelectromechanical systems (MEMS) is a significant foundation for commercialization of MEMS.

微机电系统(MEMS)的计算机辅助设计(CAD)是MEMS实现商品化的重要基础。

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An engineering design approach to Microelectromechanical systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology.

本书介绍的微机电系统和微系统的工程设计方法涉及电气和机械两方面技术。

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Application of Microelectromechanical Systems (MEMS) in phased array antenna is discussed in this paper.

主要讨论了微电子机械系统(MEMS)在相控阵天线中的应用。

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Application of Microelectromechanical Systems (MEMS) in phased array antenna is discussed in this paper.

主要讨论了微电子机械系统(MEMS)在相控阵天线中的应用。

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