These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electro-mechanical systems (MEMS) that can perform real-time distributed control.
这些微器件与信号调节和处理电路集成后，组成了可执行分布式实时控制的微电子机械系统(MEMS)。
Potting is a key step for the packaging of high-g micro-electro-mechanical system(MEMS) accelerometer.
灌封是高量程微机械加速度计实用化的一个关键步骤。
Micro adhesive bonding technology shows great potential in the assembly of micro-electro-mechanical system (MEMS) products.
微胶接技术非常适用于微机电系统产品的自动化装配过程。
Optical switches made with micro-electro-mechanical systems (MEMS) technology bear advantages of both MEMS and traditional optics.
微电机械系统（MEMS）光开关是微电机系统技术与传统光学技术相结合的新型机械式光开关。
A method is presented to manipulate microspheres using liquid bridge forces to overcome the influence of adhesion during micro-electro-mechanical system assembly.
为了克服粘着对微机电系统装配的影响，提出了一种利用液体桥力实现微球转移操作的方法。
The silicon microelectromechanism is introduced in this paper. The micro-electro-machining methods and many examples of the micro devices are also given.
在介绍硅微电子机械学的同时，给出了硅微电子机械加工方法和微小器件实例。
Giant magnetostrictive thin films are very promising for micro-electro-mechanical systems (MEMS) as they combine high energy output, high frequency and remote control operation.
超磁致伸缩材料以其高能量输出、高操作频率、远程非接触式控制等特点广泛应用于各种微机械系统中。
Objective To observe the growing shape and function of Madin-Darby canine kidney (MDCK) cells implanted on the polysilicon nanopore membrane by micro-electro-mechanical system (MEMS).
目的 利用多晶硅纳米孔技术人工合成一种多孔隙薄膜，并在薄膜上培养狗肾脏细胞（MDCK），观察细胞生长情况及膜的生物相容性。
In recent years, with micro-electro mechanical systems (MEMS) penetrating gradually through optics, a full new technique field-micro-opto-electro- mechanical systems (MOEMS) came into being in 1990's.
最近几年来，微电子机械系统（MEMS）逐渐向光学方面渗透，在二十世纪九十年代中后期形成了全新的技术领域—微光机电系统（MOEMS）。
Micro-electro-mechanical system(MEMS); Accelerometers; Microstructure; Stiffness; Force method; Principle of work and strain energy;
微机电系统；加速度传感器；微结构；刚度；力法；功能原理；
At present, the Micro-Electro-Mechanical System (MEMS) is widely applied as the actuators and sensors in the aeronautics and astronautics.
目前，微机电系统(MEMS)作为致动器和传感器已被广泛应用于航空航天领域中。
With the development of sensors technology, Micro-Electro-Mechanism System(MEMS), modern networks and wireless communication technology, wireless sensor network (WSN) comes out and develops gradually.
无线传感器网络随着传感器技术、微机电系统、现代网络和无线通信等技术的进步孕育而生。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Communication is a very important application domain of micro electro opto mechanical system (MOEMS).
通信是微型光电机械系统技术的一个非常重要的应用领域。
MEMS (micro electro mechanical system) is a new field which has a lot of advantages: small volume, light weight, low energy consumption, fast response, big batch and low cost etc.
微型机电系统是一个新兴的技术领域，其主要优点是体积小、重量轻、能耗少、响应快、大批量、成本低等，有广泛的应用前景。
The paper expatiated the principle of giant magnetostrictive motor from structure and properties, and the application status in micro electro mechanical systems (MEMS).
从结构和性能上阐述了超磁致伸缩微型马达的原理及其在微机电系统中的应用状况。
A hair cell vector hydrophone based on micro electro mechanical system (MEMS) was presented in this paper.
提出了一种纤毛式微机电系统(MEMS)矢量水声传感器的仿生组装技术。
In 3d scanning process of micro electro discharge machining (micro EDM), the machining efficiency and geometrical tolerance are difficult to be guaranteed due to the serious electrode wear.
进行微细电火花三维扫描加工时，由于电极损耗相对严重，导致形位公差难以保证和加工效率较低。
A flexural oscillation model about V-shaped silicon electro-thermal micro actuator is presented.
提出了V型电热硅微致动器的弯曲振动力学模型。
According to the method of modular design of reconfigurable machine tool, a multifunctional system for micro electro-discharge machining (EDM) and electrochemical micromachining (EMM) was designed.
基于可重构机床模块化的设计方法，设计了一套可进行微细电火花加工和微细电解加工的多功能微细电加工系统。
As the rapid development of electro optical technology, the new subject to develop micro array filters is put forward for capturing high speed moving targets.
随着光电信息技术的飞速发展，为捕捉高速运动目标的信息，提出了研制微型列阵滤光器的新课题。
A novel electro-thermal actuator is presented by using non-silicon micro fabrication technology.
介绍了一种由非硅微加工技术制作的电热微驱动器。
In order to use electro discharge machining (EDM) technology to manufacture micro-machines, analyzed the key technologies of micro EDM, and developed a micro EDM machine tool.
为了将电火花加工技术应用到微机械制造中，分析了微细电火花加工中的关键技术，开发了微细电火花加工机床。
Micro electro mechanical systems Multi-granularity macro-modeling Non-standard structure Model order reduction;
微机电系统； 多粒度宏建模；非标结构；模型降阶；
The results of the study show that to use micro-computer is a very ideal and reliable method for dynamic test, model identification, digital simulation and aided debugging of the electro-hydraulic$…
实践表明，用微机对电液控制系统的动态测试、模型辨识、数字仿真以及辅助调试是一种理想、可靠的方法。
Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage.
微机械技术是研究，生产微机械器件和微电子机械系统的关键技术，熟练掌握并不容易。
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
Micro Systems Engineering includes Micro Electro-Mechanical Systems (MEMS) and related equipment design, manufacture and package.
微系统工程包括微机电系统(MEMS)及相关设备的设计、制造和封装。
This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto- electro -mechanical systems (MOEMS) optical switch with a slant lower electrode.
从基于微机械光电系统（MOEMS）的倾斜下电极扭臂式光开关出发， 求解雷诺方程， 得到空气压膜阻尼系数和阻尼力矩的分析公式。
A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.
针对基于微压印成形三维MEMS器件制造工艺多层压印的需要，开发了一套基于视频图像对正原理的压印光刻对准系统。
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