A piezoelectric micropump based on MEMS technology is presented.
介绍了一种基于MEMS技术的压电微泵。
The two parts are fabricated by MEMS technology and combined as aw.
器件采用微电子机械加工技术和键合技术研制。
The requirements of aerospace technology to MEMS technology consist of two aspects.
空间技术对MEMS技术的需求主要体现在两个方面；
Study on Simulation and Fabrication of Magnetic Bead Microchip Based on MEMS Technology;
利用微磁学的有限元法，模拟计算了样品的磁滞回线。
Then, communication devices based on MEMS technology and their applications are reviewed.
重点综述了基于MEMS技术的通信器件及其应用。
The work described in this paper is to use MEMS technology to produce PCR microchip on silicon.
本文的工作是利用MEMS技术在单晶硅上制作集成PCR芯片。
In the chapter 5, Based on the MEMS technology, a method of fabrication of micro EHD pump is presented.
第五章利用MEMS技术，初步研究了一种用于被动传热的微型ehd泵的工艺。
A micro sampling actuator driven by electromagnetic force is designed and fabricated by MEMS technology.
设计和采用MEMS工艺技术制作了一种由电磁驱动的微量取样执行器。
MEMS technology is thought as one of the most prospective manufacturing technologies for optical components.
MEMS技术由于其自身的诸多优点而被认为是目前最有前景的光器件制作技术之一。
A method using micro-volume thermal conductivity detector based on MEMS technology is presented in this paper.
提出了将基于MEMS技术的微型热导池检测器用于变压器油在线监测系统当中。
This paper presents a novel method for the fabrication of micro electromagnetic relays based on MEMS technology.
本文探讨了一种基于MEMS技术的微型电磁继电器的制造工艺。
TAROT GY650 this Gyro uses MEMS Technology, ultrathin hell sealed, powered design within dustproof and waterproof.
TAROT GY650陀螺仪采用MEMS微制造技术，超薄型全封闭、防尘，防溅水设计。
Microfluidic chips based on MEMS technology exhibit great potentials in analytical chemistry and biomedical fields.
基于MEMS技术的微流体芯片在分析化学和生物医学领域显示了巨大的应用潜力。
In the research on MB microsystem based on MEMS technology, the design and fabrication of a MB chip is the key process.
在基于MEMS技术的磁珠微系统的研究中，磁珠操控芯片的设计和制作工艺是其中的关键。
Based on MEMS technology and electrochemical detecting principle of bio-enzyme catalysis, one biochip has been developed.
基于生物酶催化的电化学电流检测原理对人体血液生化参数进行测试。
In this paper, the introduction of the MEMS technology and some useful MEMS devices were widely discussed in the first chapter.
论文首先讨论了MEMS技术及几种常用的MEMS典型器件和本论文要用到的微机械加工技术。
A silicon piezoresistive pressure sensor based on MEMS technology SP12 is applied to be a unit in the tire pressure monitoring.
采用了基于MEMS技术的硅压阻式压力传感器SP12作为轮胎压力的检测单元，PIC16F628A作为信号控制处理与发射单元。
Meteorological monitoring system applies integrated sensors made by MEMS technology to the meteorological phenomena measurement.
气象检测系统是将集成式的MEMS工艺制造的传感器应用于气象检测的系统。
Based on MEMS technology, micro balloon actuator arrays and synthetic jets were developed for active control of flow over an airfoil.
面向主动流动控制研发了气泡型微致动器及其阵列技术和MEMS合成射流器技术。
A method for designing and fabricating a novel deformable mirror with large effective area is proposed on the basis of MEMS technology.
基于MEMS技术体硅工艺，提出一种新型大有效面积的连续变形反射镜的设计制造方法。
It was found that a certain porosity of PS film to be widely used in MEMS technology can be obtained by selecting optimal process parameters.
研究发现，通过合理的选择工艺参数，可以制备具有特定孔隙率的多孔硅薄膜，可广泛的应用于微电子机械系统(MEMS)技术中。
Compared with other maturity testers, this design has many features such as:we import the MEMS technology and make the system higher integration.
与其他西瓜成熟度检测仪相比，本设计的特点是：引入了MEMS技术使得系统的集成性更高；
An online type microwave power sensor structure is presented based on MEMS technology. The theory, design, fabrication and measurement are given.
提出了一种基于MEMS技术白勺在线式微波功率传感器构造，并对该构造停止了理论分析、设计、制作和测量。
As the rapid development of MEMS technology, the application demand of micro parts for various kinds of products in micro mechanical system is growing.
随着MEMS技术的飞速发展，微型塑件在各种微型机电产品中的应用需求越来越多。
The MEMS technology and its main characteristics are briefly described, and then its application in uncooled infrared detector is introduced in details.
本文简要介绍了MEMS 技术的工艺及其主要特点，并对MEMS 技术在非制冷红外探测器研制方面的应用作了比较详细的阐述。
Different kinds of MEMS devices and systems were born in succession along with the development of MEMS technology quickly. One of them was MEMS gas sensor.
随着MEMS技术的飞速发展，各种MEMS器件和系统相继问世，MEMS气敏传感器是其中之一。
In recent years, much attention has been paid to novel miniature piezoelectric devices which based on piezoelectric thin film technology and MEMS technology.
近年来，基于压电薄膜技术和微机械加工技术的微型压电器件受到了人们的日益关注。
An integrated CMOS-compatible Pirani vacuum sensor system has been investigated and developed in this work, combining the traditional Pirani gauge with the MEMS technology.
本文将传统的皮拉尼计与MEMS技术结合起来，研制了一款与标准CMOS工艺兼容的集成皮拉尼传感器系统。
MEMS inertial measurement unit is an accelerometer and gyroscope combination device, developed by using MEMS technology. It has small volume, low cost and high reliability.
MEMS惯性测量单元是采用MEMS技术研制的加速度计和陀螺组合器件，它具有体积小、成本低、可靠性高等优点。
MEMS inertial measurement unit is an accelerometer and gyroscope combination device, developed by using MEMS technology. It has small volume, low cost and high reliability.
MEMS惯性测量单元是采用MEMS技术研制的加速度计和陀螺组合器件，它具有体积小、成本低、可靠性高等优点。
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