Testing technique based on MEMS mainly includes testing technique of material characterization, dynamic characterization and reliability characterization.
基于MEMS的测试技术主要有MEMS材料特性测试技术、MEMS动态特性测试技术、MEMS可靠性测试技术等方面。
Testing technique based on MEMS mainly includes testing technique of material characterization, dynamic characterization and reliability characterization.
基于MEMS的测试技术主要有MEMS材料特性测试技术、MEMS动态特性测试技术、MEMS可靠性测试技术等方面。
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